How to measure the Seebeck coefficient and the thermal conductivity of thin films deposited on the ITO substrate. the thicknesses of the thin films are between 200 and 500 nm.
See this link in French you download this thesis:https://www.google.com/url?sa=t&source=web&rct=j&url=https://tel.archives-ouvertes.fr/tel-02093143/document&ved=2ahUKEwi21rOTn-LnAhURTsAKHfgfAS4QFjAAegQIAxAC&usg=AOvVaw1ByoEAgnbBK2IeyndwUATu
Do you know the three-omega method? Generally, the thermal conductivity of the thermoelectric thin films are measured by this methods. A vacuum chamber with at least four probes are needed to finish the measurement. This equipment can also be used to measure the seebeck coefficient. You may refer to this article: Article Enhanced thermoelectric properties of SnSe thin films grown ...
I attach 2 paper concerning the measurement of thermal conductivity and Seebeck coefficient in thin Ga2O3 layers. For layers with your thickness the described methods are well suitable. Thermal conductivity was measured using the 2-Omega method but the 3-Omega method is appropriate as well (see Yang Li). The thermal conductivity needs an ohmic contact between your material and an electrode. All described methods worked well and I ask you don't hesitate if you have questions.