How to measure the resistance of the order of Tohm of an insulating thin film like SiNx/SiONx?

Bibhuti B Sahu @Bibhuti_Sahu

12 December 2017 0 9K Report

How to measure the resistance of the order of Tohm of an insulating film like SiNx?

Simple calibration method would be better.

Thankful for any suggestion?

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