Hello,
I already tried SnCl2-2H2O(99.99%, aldrich) 0.2 g in ethanol 8 ml, and stirred 24 hours in 80 ℃ . And then, I used a substrate slideglass and deposited Cr 10 nm and Au 50 nm by E-beam.
I spin coated SnO2 precursor solution with syringe filter 0.25 um on Au in 3000 rpm for 30 s.
After that, the glass was put on the hot plate for softbake in 70 ℃ for 1 min.
I repeated two times above process and after third spin coating, hardbake in 120 ℃ for 10 min.
I thought I got SnO2 film but, there were so many dark spots on the film.
Also, I tried to measure resistance of the film but so low resistance such as metal was measured (less than 100 ohm).
I wonder why there were dark spots, and low resistance was measured. I surely there was the film on the Au but, its resistance was so low and too many dark spots.
Try to deposit film in clean room and make sure you have filtered correctly. I was facing the same issue with the different film, however depositing film in clean room environment resolved these issue. Make sure you filter the solution slowly (drop-wise). You also have to make sure that your substrate and spin coater is properly cleaned.
Hi
you must also ensure the cleaning of the substrates (in an ultrasonic bath) to avoid any type of contamination
cordialy
Thank you, Sandeep Srivstav, MELOUKI Mohamed!!
It was cleaning problem!
The cleaning issue was really solved by ultrasonicator.
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