do you have Ohmic contacts? Are your samples conductive or isolating?
I would prefer measurements in Hall geometry but the problems with contacts are the same. If the resistance is too high, I would produce at first thicker films.
I agree with Rüdiger that the resistivity of your films must be too high to be measured using a four-point probe system. You have to use a Hall effect measurement. It is good to have relatively thick films as long as homogenous across the area.