Dear Sutapa,

thank you for asking this intteresting question.

However, I did not get the full meaning. Please provide more information.

What do you mean by "hydrogen concentration". Is there dihydrogen (H2) on a surface of a thin film? Or are there protons in the thin film material? And what type of thin film material do you have?

Without these information, I fear, no-one can help you.

Best wishes

I really appreciate Prof. Axel Klein. Prof. has raised amazing points. A good learning for us.

Thank you Prof. Axel Klein. I am depositing silicon on glass in a hydrogen and argon atmosphere by RF sputtering. I am very new to the concepts.