I agree that from Selected area electron diffraction(SAED) and High resolution TEM studies(Fast fourier transformation, FFT), you could differentiation between short range ordering or crystallinity of the samples according to the size of the particles or grains in your film.
I would start with X-ray diffraction, since this will give you an average over your sample area. For exploring specific areas of your sample that may be crystalline and/or amorphous, I would suggest using TEM as well, in conjunction with SAED and FFT. FFT will help you figure out with areas might be crystalline (as you examine the entire TEM specimen), and then the SAED can be used to study the crystal structure of these individual areas. Good luck!