Dear Abdulhadi,

You can use spectroscopic ellipsometry which gives you thickness with high accuracy. But for some materials, this measure is difficult or even impossible.

Also cross-sectional view by Scanning Electron Microscopy (SEM) can be used.

With my best regards

Prof. Bachir ACHOUR

Abdulhadi.... XPS (X-ray Photoelectron Spectroscopy) as a surface analytical technique has been used successfully in characterization of a variety of thin films (Non-destructive depth profiling and Destructive depth profiling with Imaging )

http://www3.ntu.edu.sg/ThinFilms/mae-thinfilms/Thinfilms/pdfpapers/MT-17-234.pdf

Dear colleague Abdulhadi Kadhum

Have a nice time and good day, Peace be up on you.

One of the following methodes you may use according to  condition of the film to 

calculate the thickness of thin film

1-    An interferometric method, more details is available at: TOLANSKY S. Multiple  

        beam interferometry of surfaces and films. London: Oxford University Press, 

       1988: 147.

2-    Using mass of the film, m according to the next details::

 W1 is the weight of cleaned substrate

W2 is the weight of cleaned substrate plus film

W2-W1= the weight of the film

ΔW=mg

m = ΔW/g

m=ρXV   ;   ρ, is the density of film material and V is the volume of the film                   

the Volume  = (Width X Length X Thickness) of the film

3-    SEM or AFM  (film-substrate ) cross section.

I wish this is useful and help you.

Yours

A. El-Denglawey

Dear Abdulhadi

thanks for you and for all the researchers which sheering to answer your quastion, espesally to Mr. A. Eldenglawey

Thank you my brother Dr.Raid for your perfect answer

Dear Dr. Abdulhadi

see the following video may be help you

https://www.youtube.com/watch?v=g2uETbwBQ_Q

you will come brother.