Dear Abdulhadi,
You can use spectroscopic ellipsometry which gives you thickness with high accuracy. But for some materials, this measure is difficult or even impossible.
Also cross-sectional view by Scanning Electron Microscopy (SEM) can be used.
With my best regards
Prof. Bachir ACHOUR
Abdulhadi.... XPS (X-ray Photoelectron Spectroscopy) as a surface analytical technique has been used successfully in characterization of a variety of thin films (Non-destructive depth profiling and Destructive depth profiling with Imaging )
http://www3.ntu.edu.sg/ThinFilms/mae-thinfilms/Thinfilms/pdfpapers/MT-17-234.pdf
Dear colleague Abdulhadi Kadhum
Have a nice time and good day, Peace be up on you.
One of the following methodes you may use according to condition of the film to
calculate the thickness of thin film
1- An interferometric method, more details is available at: TOLANSKY S. Multiple
beam interferometry of surfaces and films. London: Oxford University Press,
1988: 147.
2- Using mass of the film, m according to the next details::
W1 is the weight of cleaned substrate
W2 is the weight of cleaned substrate plus film
W2-W1= the weight of the film
ΔW=mg
m = ΔW/g
m=ρXV ; ρ, is the density of film material and V is the volume of the film
the Volume = (Width X Length X Thickness) of the film
3- SEM or AFM (film-substrate ) cross section.
I wish this is useful and help you.
Yours
A. El-Denglawey
Dear Abdulhadi
thanks for you and for all the researchers which sheering to answer your quastion, espesally to Mr. A. Eldenglawey
Dear Dr. Abdulhadi
see the following video may be help you
https://www.youtube.com/watch?v=g2uETbwBQ_Q
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