In photo-lithography, laser irradiation changes polymer resists toward become insoluble or soluble, depend of the type of polymer resists either negative or positive. Nevertheless, what is the chemical reaction took place?
Even this laser irradiation, as we investigated it, could be useful in fabricating Diamond-like carbon. Care to give deep explanation..please share us your thought.
Here is some of our work on longer exposure of Polystyrene to laser irradiation.
It is photochemistry. You have to know the chemical structure of the resin(s) and draw a reasonable reaction mechanism followed by the identification of the reaction product.
Thanks Andrei Blasko. We found over-exposure, has created simultaneous effect to the polymer and later the irradiated polystyrene turn into diamond-like carbon. We are now focusing on the diamond like carbon and how the affect of laser irradiation, photon induce the phase changes from amorphous to crystalline structure, thus increasing its conductivity property. Care to read the papers I attached, cause now I am curious on how these photon initiated the diamond-like carbon rearrangement.
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