Please tell me about the rate (in SCCM unit) of the flow of gases and pressure inside the tube.
hi
Article Strain relaxation in different shapes of single crystal grap...
Utilizes LPCVD technique to produce graphene single crystals.
Article Growing graphene on polycrystalline copper foils by ultra-hi...
Uses UHV and CVD, while you want LPCVD. .... not quiet what you want but reference might have some value to compare. :
Please be aware that optimized flux (sccm) or pressure (Pa) values are strongly dependent on the reactor geometry; you may find fiercely different parameters in various publications that all give - one way or another - good results.
The following link may be useful for you
https://www.researchgate.net/publication/298899892_Synthesis_of_Graphene_Films_on_Copper_Foils_by_Chemical_Vapor_Deposition
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