How does underlayer affect the roughness of thin films?

01 January 2013 1 5K Report

It is observed that when using some underlayer for e.g. Al, the roughness of the thin film is affected. Why does this happen?

Rafael Manory

This question is very general because the surface roughness can vary. In general very thin films would mimic the surface roughness. This would happen mostly with evaporated or plasma-deposited films, less with sputtered films. This is because the film starts by adhering to the surface and at that stage it replicates the surface features. Because of surface diffusion of the deposited species, this effect will stop when the thickness is such that it can bridge over surface features.

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