Hi Karima

You Can find a similar question with some Answers at this link:

https://www.researchgate.net/post/Does_anyone_know_o_have_experience_how_to_etch_SnO2_sputtered_film

You will find there some Wet etch chemistries and suggestions about plasma & IBE eth.

Regards

Mohamed.

Thank you

i did with by HF

I tried it but it takes long time (30min) !

You can try laser ablation technique or photo-lithography if you have them around....

I did with (HCL with heating 60°C), it work very well.

HCL diluted in water or HF ?

you immerses your sample in HCL at 40 or 60 ° C

HCL diluted or not you can try both.

Plasma etch with Cl2 and Ar help