How can I remove a thin Cu/Ag film from germanium substrate using the chemical method?

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Thomas Keith Ellis

Depending on the thickness i think your best bet is nitric acid room temperature (

Dirk Salz

Depending on the thickness of the films hydrogenperoxide (50%) is a possible solution.

Carlos Araújo Queiroz

You may selectively etch the Cu/Ag layer over Ge substrate with a freshly prepared aqueous solution of ammonium persulfate (about 40 g / 100 ml water), slightly acidified with sulfuric acid (say, by adding 2 drops of concentrated acid / 100 ml water).