I want to adjust the electron beam by adjusting the C2 and C3 lenses to obtain a nanometer-sized electron beam for nanobeam electron diffraction in STEM. However, I don't know how to measure the exact value of the central spot diameter.
Yuri Mirgorod
Wang Danan
The diameter of the central spot (electron spot) in nanoelectron diffraction in a scanning electron microscope (SEM) is not measured directly. However, the size of the spot that is focused by the electron beam affects the spatial resolution of the microscope. Otherwise, the microscope device must be changed to change the diameter of the central spot.
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Stefan Baunack
Here is a tutorial for TEM/STEM alignment. Hope this helps
Edit: missing link
https://www.rodenburg.org/STEM/index.html
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