I'm trying to use new material in Sentaurus TCAD. I have created newmaterial.par file and corresponding changes are made to local datexcodes.txt file. When I tried running, following error is displayed.

Error in "datexcodes.txt" at line 1, offending input: .1

syntax error !

Actually first few lines in datexcodes.txt is not modified and only the default one as shown below:

DATEX2.1

Datacode

"$DateTime: 2013/09/11 07:15:25 $"

"Data codes for semiconductor process and device simulation"

Kindly help me to fix this problem.

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