I want to make a silane (anti- stiction) layer of TMCS Trimethylsilyl chloride by evaporation silanization process on PDMS surface. Please let me know the process to do it.
My method is virtually the same as that described by Aslan, however for PDMS I exposed the surface to an oxygen plasma for about 10s prior to silianisation, this increased the measured contact angles considerably. You will most likely find one in a good cleanroom. Don't put the sample down on glass inbetween processes, it will be well bonded!
Ah, yes. That I forgot to mention, as it is included in the cleaning procedure. Dear Jonathan is right. You better use O2 plasma or UV/Ozone cleaner for up to 3 minutes if you have access to one.
Thank you very much for your valuable reply. @Aslan @pepter. But I just have one more concern, is it really compulsory to do O2 Plasma or UV/Ozone treatment. Would TMCS evaporation be successfully possible without doing O2 Plasma or UV/Ozone treatment (Actually we don't have this treatment faculty in our group).?
Dear Charchit, I haven't tried without O2 plasma but I think it would possible to do without. You would know for sure if it worked or not, after doing the water droplet test. If the water droplets are highly mobile on the surface then you got what you want or else just be sure that you did everything right and wait for another night. :)