You can try immersion (or spincoating) of the glass in the suspension of nanoparticles. Glass should be clean, very clean. Electrical charges and proper surfactants may help a lot. Nanoparticles (possibly with surfactant layer) should have opposite charges to the glass (can also be coated with proper surfactant). Other way is to use electrostatic atomization (EHDA) of nanoparticle suspension few centimeters above the glass.

Would RCA clean also suffice in cleaning the glass surface? Thanks!

It should be enough. How dense should be the coating? Do You need just nanoparticles with free glass between, monolayer of nanoparticles or multilayer? You should manipulate the suspension concentration and may be use other technique.

If you can use a conductor glass substrate you could try an electrochemical technique. These techniques  are very versatile and able to produce deposits with different  morphology using  the proper experimental conditions.