Dear Sara.

There is CasaXPS Manual you can download from internet.

in brief, 

1. set regions (for base line)

2. add components (as many as you can assign and explain)

here, there are too many options you can change.

So I suggest to doing with the manual.

or these website will be helpful for you..

http://mmrc.caltech.edu/XPS%20software/CASA/CasaXPS.html

http://www.casaxps.com/help_manual/

I do agree with suggestion, but I can also recomend to type on youtube CASAxps manual.  Please paz attention to the peaks zou are inserting in order to avoid C1s fit with 12 peaks, which we saw in parallel discussion. Use table bz Beamson and Briggs for references, it is good for starters. look to the link below

http://surfacespectra.com/xps/

I really appreciate all your answers. Thank you Won Doh, Justin Corham and Anton Manakhov.

The CasaXPS cookbook can also be bought in the paper version, quite useful in a lab for several persons.

The program is able to recognise the sensitivity factors corresponding to the spectrometer used, it is possible to do quantification directly from the program.

Dear Sir,

I would like to deconvolute F1s spectra in casaxps. Im expecting AlF3 in my sample. During deconvolution i coulnt able to find out, and my peak was shifted to some eV. Is there is a possibility of some other co-ordinatin environment there? I attached the F1S spectra data in .xls format. Kindly help me in this regard.