I have encountered complete blockage of needle valves used for TiCl4 (in chemical vapor deposition). Despite heating of valve, the needle valve is completely blocked and does not open even with water or compressed air. What can be done to solve this problem?
Catherine Ellen Rice
The valve may be unusable, I'm afraid. TiCl4 reacts with water to create TiO2, which is only soluble in concentrated HCl or H2SO4 or HF. These acids would likely ruin the valve. I'm not sure if there is anything you can do.
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Xuhua Wang
I fully agree with @Catherine Ellen Rice. You may need to have several needle valves as consumable parts though.
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Mohammad Reza Derakhshandeh
Thank you for your response. The problem is solved by disassembling, washing and reassembling.
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