How can detect oxygen vacancies which is created in the prepared material of BaTiO3 due to introduction of a ''Sr or Zr , Mn' elements ?

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Yaksh Rawal

Hi,

Easy way to do this is while making your samples, create 2 samples, identical in same chamber of the tool used for preparing. They both should have same processing conditions.

Use one sample for making your device and use the other sample for material characterization, oxygen vacancies can be found by XPS/XRD or SIMS or Raman Spectroscopy.

Please refer to the following paper.

I think XPS is better option than XRD.

http://cpl.iphy.ac.cn/fileup/PDF/2007-0580.pdf