We have a quartz tube furnace (diameter 80 mm) outside the cleanroom and when tried to pyrolyse the SU-8 on SiO2 coated Si substrates at 900 C in nitrogen atmosphere, the electrodes looks fine. But then start to delaminate completely when rinsing with IPA or water. Has anyone observed or struggled with similar adhesion issues? If so, what options did you try to get it rectified.
Your valuable input is highly welcomed.
Anjali Achazhiyath Edathil
Without SiO2, SU-8 is normally pyrolyzed at your temperatures.
https://orbit.dtu.dk/en/publications/high-temperature-su-8-pyrolysis-for-fabrication-of-carbon-electro
Apparently despite the presence of nitrogen with SiO2, partial oxidative pyrolysis occurs and it imparts fragility to the electrode. Reduce pyrolysis temperature.
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