Has anyone observed delamination of pyrolysed SU-8 on SiO2 coated Silica substrates when the pyrolysis is performed outside cleanroom?

We have a quartz tube furnace (diameter 80 mm) outside the cleanroom and when tried to pyrolyse the SU-8 on SiO2 coated Si substrates at 900 C in nitrogen atmosphere, the electrodes looks fine....

09 November 2020 4,514 2 View