I cannot produce plasma although everything is set correctly - voltage cable is not interrupted, gas inlet is not clogged, deposition parameters are set according to the instructions. Maybe there is something else, which is specific?
What you want to sputter? Metal?
May be one of meters are showing wrong information.
I had face same problem before.
Have you gone through the troubleshooting section of the manual? if not pls follow http://www.quorumtech.com/pdf/currentProductInstructionManuals/K550X_Instruction_Manual.pdf
Yes, actually, I have it like official documentation to the equipment. I think I found the problem in the electronic circuits, generated the high tension for the plasma glowing. Thank you for your time!
We are having the same problem, checked every thing but no success. Could anyone please give us any clue..?
Dear Mr. Khan, in our case the problem was in integrated circuit NE5560 -this is pulse generator, governing optonic system. The output of this scheme is pin 15 and we cheked for pulses. If there are no pulses, then the chip is failed. The temperature range of this scheme according to the data sheet is 0-80oC. The equipment was delivery in the middle of the winter, so I suppose the lower then 0 oC temperature caused this failure.
Have you guy clean your coating chamber?
If the deposition of material too much on the chamber surface,it change the impedance in the chamber..last time we need to wait more than 20 minutes for plasma to be generated..after chamber cleaning, it only take less than 7 minutes for plasma to be generated..
maybe you can try this if everything is okay but the plasma still not generate.
Thank you, Mr. Omar, for your suggestion! We should try everything, although especially in my case the sputter is new, so material has never been deposited.
Thanks Mariya for your suggestion. I will check our system's IC now. Actually this system is new and we are trying to get our first coating from it.
anyway I will check its IC.
Thanks Omer. I will keep your suggestion in mind for future. but still we are try for 1st deposition.
Have you try to check the bias voltage across the electrode when you start the coating process? If your coating is DC sputtering,please use high voltage probe to your oscilloscope..if you are good in bypass the systems,this will be easy..
Regular multimeter can only read DC/AC voltage not more than 1kV..step up transformer in coating sputtering normally have output more than 2kV..
One probe attach to the cable and other one will be ground (normally)..
Wish you success using your new coating system..
Oh ya this will be a valid option that I was not thinking. Thanks Muhammad. I will check it. Hope this time will succeed.
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