For removing lift off resist on MoS2 FET structure, is TMAH based solution effective?

18 January 2025 0 1K Report

For various metal electrode with bilayer pattern (photoresist and lift off resist ) deposited by thermal and e-beam evaporator, I often use DMSO based solution to lift off metal on bilayer.

However, is it effective to lift off that using TMAH based solution, which i think that it may cause chemical damage or delamination of MoS2 to the substrate (especially 2.38wt%)?

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