Does etching of amorphous silicon effect the InGaAs substrate?

09 October 2023 1 5K Report

I have amorphous silicon deposited on top of the InGaAs substrate. My InGaAs substrate needs to be reused which can be done for etching amorphous silicon. Amorphous silicon has standard etching recipes using SF6. But, will these etching recipes affect the InGaAs substrate

Zheng Tao

I think the etch selectivity between aSi and InGaAs should be very high with SF6 base low bias power etch process. I expect very little impact to the InGaAs substrate after aSi etch.

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