I have to introduce Si(1-x)Cx as source drain material in 110 direction. Needed parameters are elasticity matrix, density, lattice constant and initial strain values. A document on formulas or rule of mixture will also be helpful.
Problems right now: I have the elastic constant matrix found from the formulas but not sure if the SiC to be used is istropic in S/D.
Density also found from Rule of mixture but still not sure. as i couldnt find much literature to back that value.
Hi Yousuf,
please provide some details to your question, maybe also a screenshot of what comsol needs as an input, it will be easier to help you then!
Best regards,
Antoni
Hi Antoni,
U can find some images of strain and material properties attached to this comment. The model is an FDSOI nfet.
Actually the values I found for the elasticiy is by using the formula ( Cij = Cij,Si·(1-x) + Cij,C·x ) for the elasticity constants of C11 C12 and C44, x is the % of carbon. After that rotating it in 110 axis. density and strain by rule of mixture.
I have the answers if someone needs any help He/She can contact me.
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