02 August 2022 1 8K Report

I am trying to sputter ITO film with RF at room temperature on the flexible substrate, but my lowest resistivity can only be 2.5Ω ·cm. My sputtering condition :30min/0.3~1.5pa/120w/Ar/room temperature. I have referred to many papers, but my experimental results have been unsatisfactory. What can I do to get the resistivity down

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