To measure the relative permittivity of a p-type semiconductor material (a metal phthalocyanine ) , a M-S-M structure was made by thermal evaporation method. The capacitance was measured by a LCR meter at room temperature under the frequency of 1 kHz and the thickness of semiconductor layer and active area of our sample were known  .{ C=ε_r ε0 A/d }this equation was used to calculate the ε_r.

but the calculated value was lower than one! about 0.000035

I think that our LCR meter must be defective.

What do you think?

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