Can PMMA be removal with AZ100 resist?

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Carlos Araújo Queiroz

About the compatibility of the 'AZ 100 Remover' with PMMA, you may check a related discussion: https://www.researchgate.net/post/Can_AZ_100_Remover_cause_damages_on_PMMA_thin_films

About solvents for PMMA, please see: https://www.researchgate.net/post/With_PMMA_which_solvent_to_use

Yaksh Rawal

Hey!! Dawuth, Please check, I think AZ100 might have Alkaline ions in it, not compatible for CMOS process.

Also the AZ100 in our lab is old so please check the mfg and expiry date of the chemical.