I am depositing Germanium on silicon by thermal evaporation. I am using Tungsten boat.
My question is that can i use same boat multiple time for germanium deposition (Reuse same boat for next deposition)? Will it contaminate the sample and effect the film property?
Ambuj Mishra
In my opinion...Yes, you can use it multiple times after proper cleaning because Ge has a melting point ~940 degree Celsius which is 4 times less than that of W ( ~3400 degree Celsius). Generally, W does not react with other material in thermal evaporation, so your boat will not be affected.
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Jeff Lince
Yes, you can. In fact since it has been used previously, it is well-outgassed and should provide a lower contamination source than a fresh boat.
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