Can you please suggest chemical for selective etchant for Poly and Single crystalline SiGe wafer with respect to Si?
i want to use it for SiGe NWs fabrication process
Dear Chandra,
please refer to the paper in the link:http://www.jsts.org/html/journal/journal_files/2013/12/year2013volume13_06_18.pdf
and the link: https://link.springer.com/content/pdf/10.1007%2FBF02665519.pd
Best wishes
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