Hello
I have a couple of sputter targets that are not working anymore because they have holes burned in the middle - the Ar plasma arc is burning out almost only around the middle region of the target (see picture).
Since there is clearly some 90% material left can I somehow reuse/recycle the target?
Is there a possibility to recast it to be thinner but still working?
I use pure gold and Au/Pd: 80/20 targets.
If your target comes out of the process like this, you have already used too much of it. The racetracks should not penetrate to the ground.
If your target consists of valuable material, you can possbily make a deal with your target supplier so they take it back for the pure material price.
Melting and reshaping requires controlled environment, which may be more difficult task ...and if contamination occurs that will affect your results...hence better option is to give it to supplier and get discount...
Hi Maciej, this is very typical with magnetron sputtering. However you should find, (as Jurgen mentioned) that most target suppliers will offer a recycling service for old targets.
You cannot use the target used in magnetron sputtering electrodes which have punched through as shown by you, they have been used too much.
In case they are valuable metals, and quite expensive being of high purity, and you have a high temperature vacuum melting furnace, you can melt them in a suitable crucible, and recast them in a suitable mould, or use the scrap for vacuum evaporation by cutting the metal into small pieces. Please avoid contamination.
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