The number of atoms ejected from the solid per incident ion is called the sputter yield.  The sputter yield depends on the ion species, energy and angle of incidence.  It also depends on the target material.  There is a massive literature on sputter yields that includes experimental results, simulations and theory.   A good entree to the literature is "Low-energy ion irradiation of solid surfaces" by H. Gnaser (Springer, Berlin, 1999).

Thank You Bradley.

Sputtering by Particle Bombardment I, II and III, ed. by Rainer Behrish et al.,

Springer

Ask Wolfgang Eckstein (Garching) and Vladimir Shulga (Institute of Nuclear Physics Moscow State University)

Thank You Mashkova. I'll contact those above person. 

In addition to the above literature, you can read Eckstein's book "Cjmputer Simulation of Ion-Solid Interactions" (Springer, 1991). Wolfgang Eckstein is the top expert in this field.

Thank You Shulga.

Sputtering by

Particle Bombardment

Experiments and Computer Calculations

from Threshold to MeV Energies

by

Rainer Behrisch,Wolfgang Eckstein (Eds.)

You are so kind. I think it is always better to thank more than less. Thank you twice.

You can read the book namely Ion-Solid interactions: Fundamental and applications by Nastasi, Mayer and Hirvonen