I want to know that when an energetic projectile ion (for example consider 500 keV Ar ions) deposits its all energy in some solid target material (eg Si), what will be the rise in temperature of that nanometer region? Also how this temperature is affected by the fluence of the ion beam?
If all the energy is converted into heat, you need just the volume of your region and the material's density, so that you can calculate the mass of the volume where the energy is deposited.
You can then gain an estimation of the temperature rise with:
dT = Q/(m c)
where Q is your energy of the particle, m is the mass of your volume and c is the specific heat capacity of your material.
Just to add, the volume must be the volume, which is passed by the particle when beeing stopped in the target material. @Johannes formula is correct, the volume is more difficult to be determined. You must use the range of your particle in this special material. And take care, keV is no SI unit, you have to translate to Joule.
@ John kennedy, I want to calculate rise in temperature for single ion, once for single ion is known, we can calculate the same for given ion flux.
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