Sputtering is the best technique and a cold process. Most chemical methods are high temperature based, and will always destroy the film-substrate (316L) interface.

As you are planning to deposit very thick layers, you must ensure a good interfacial reaction to ensure strong adhesion. Otherwise any residual stress in the deposited layer would peel away the deposited films.

Reactive sputtering of pure Ti metal target in an oxidising sputtering gas (Ar, or Ar+O2) would definitely give you a Ti-O films, and can be amorphous if deposited under no-heating. If you want to obtain crystalline TiO2 films, you may need some substrate heating  to crystallise the film.

Achieving 10 micron thickness, is not so difficult, because we have been able to deposit another oxide insulator ZnO upto 14 microns thick.

But achieving a 100 micron thick film is a technicall challenge, and films need to be deposited under totally stress-free conditions, and with good initial interfacial adhesion to the substrate.

K. Sreenivas 

Spin coater is usually used to deposit a thin film. Chemical or electrochemical methods can be used to to deposit TiO2 coatings with 10-100 microns.

 I totally agreed with the prof.K. Sreenivas in that "a 100 micron thick film is a technical challenge, and films need to be deposited under totally stress-free conditions, and with good initial interfacial adhesion to the substrate."

In this case using wet coating technique, tetrabutyl titanate or similar titanate based compound as coating solution precursor then by dipping, brushing ,spraying  or spinning apply this precursor solution on the surface  then on slowly heating up to 400C, the thermal decomposition of titanate will produce thick ,adherent ,dens, defect free layer of titanium oxide. It is inexpensive and easy way.

 Regards 

Depositing thick films on SS could be a real challenge. Most of the work in the literature is on other substrates.

You may want to look at this reference where ∼10 micron thick nanocrystalline TiO2 film was deposited on conducting PET plastics by various methods such as spraying, spin coating, and screen printing.

Krishna C. Mandal, Anton Smirnov, D. Peramunage and R. David Rauh (2002). Low-Cost, Large-Area Nanocrystalline TiO2 -Polymer Solar Cells on Flexible Plastics. MRS Proceedings, 737, F8.45 doi:10.1557/PROC-737-F8.45.

You could also try laser ablation or doctor blade technique also. It is easy to deposit submicron films by laser ablation but thicker films may be challenging. Any way you could check.

It is possible using spray coating technique (where decomposition and deposition of Titania precursors take place).

You can also use Dip coating technique if you have pre-prepared Titania sol.

you may try electron beam evaporation (EBPVD) method.  This will give you 10-100 micron thickness.