Hi Team,
We are evaporating Ti/Au 20nm/300nm film. The film is fine, post-evaporation. However, after annealing it in the furnace at 350c with N2, the film has black dots all over it. Please see pic attached.
What is the reason and how to fix it, any help will highly be appreciated. Thanks
It appears that the black dots that appear on the film after annealing it in the oven at a temperature of 350 degrees Celsius may be the result of several factors, including:
1. Film contamination: There may be contamination in the annealing process, whether it is from the atmosphere or the materials used in the annealing process.
2. Chemical reaction: A chemical reaction may occur between the film components and the environment at the annealing temperature, leading to the formation of black dots.
3. Formation of a metallic layer: Film annealing may cause the formation of an unwanted metallic layer, which appears as black dots.
To fix this problem, you can try the following steps:
1. Clean the oven and equipment well before annealing to reduce contamination.
2. Check the annealing conditions such as temperature, pressure and gas used to ensure that they match the requirements of the annealing process.
3. Verify the quality of the materials used in preparing the film and ensure that there is no contamination in them.
4. Conduct experimental tests using different annealing conditions to determine the optimal conditions that limit the formation of black dots.
If the problem persists, you may need to consult industry experts for additional assistance.
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