Black dots on ebeam evaporated Titanium/Gold Ti/Au 20/300nm films?

Hi Team, We are evaporating Ti/Au 20nm/300nm film. The film is fine, post-evaporation. However, after annealing it in the furnace at 350c with N2, the film has black dots all over it. Please see...

20 March 2024 167 1 View