I'm not sure with super efficiency, but a medium sized DEA problems can be solved with Excel Solver (An addin for MS Excel) itself. It will also generate the sensitivity analysis report also including details like shadow price, reduced cost and the corresponding higher and lower limits.
In addition to the above there are specific DEA software as well.
You may refer to the answers posted to a similar query in RG before from the following link
Thanks for the reply. Actually I have around 100 DMUs and use OSDEA. It can work with any no of DMUs with many variables and have several models. But can not do sensitivity analysis and does not have super efficiency model.
Thanks for the reply I did get a version of solver from the link though it will only work with upto 50 DMUs
Refer to the following paper, it reports three free DEA packages namely, FEAR, DEAP, EMS.
Iliyasu, A., Mohamed, Z. A., & Terano, R. (2015). Data envelopment analysis models and software packages for academic purposes. Pertanika Journal of Scholarly Research Reviews, 1(1).
This paper cab be downloaded for free through google scholar.