04 November 2015 3 7K Report

For many years I am using an SEM (scanning electron microscope) with variable pressure (i.e. low vacuum) which dramatically helps if any kind of charging occurs. Often only a very small chamber pressure of 7Pa is enough to stabilize the scan so that no remarkable image shift appears during a long-time investigation by EBSD. Unfortunately, for high-resolution investigations a major argument is the reduced spatial resolution caused by interaction of the beam with the N-atoms which are responsible for decharging of the surface.

An older and newly reinvented technique are local gas injection. Is this technique really better, or only better for very small scans?

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