Acetone will remove most PMMA based residues, however, it is worth rinsing the using Isopropyl-alcohol (IPA) and drying with Nitrogen gas. If you are still finding residues there are several approaches you can take to reduce them.
First, the residues may also be under the graphene film from the copper etching process so rinse the film in multiple baths of deionised water. Also, APS tends to leave a bluish tint to the graphene try to stick with Ferric Chloride, Ferric Nitride or dilute Nitric acid, if that is what you are worried about.
Second, try to use thinner PMMA low density (100K-495K) films (150-300nm), which I have found helps with reduced residues.
Finally, annealing your sample either in a Hyrdrogen/Argon or a Helium atmosphere at around 300 centrigrate which have improved the electrical characteristics of my samples and can also remove PMMA residues.
Other than that make sure your glassware and tweezers are spotless. You can use Chlorobenzene or Chloroform, however these chemicals are a little bit nasty compared to Acetone and IPA, meaning you will have to have the correct safety and disposal procedures for your facility.
PS. Dont sonicate your CVD graphene unless you want a clean, but shredded film.
Dear Thomas my sample is MONOLAYER GRAPHENE ON SiO2 GROWN BY CVD PROCESS. Will it harm my sample?
I have performed all of these on Monolayer CVD graphene I grew on copper that was subsequently transferred to SiO2/Si substrates, which showed great improvement in the electrical quality of the CVD graphene.
You will not damage your samples if you use the etchant concentrations listed in the the papers on the CVD transfer process (eg. FeCl3 is a 1 Molar solution in deionised water).
The solvents are mostly harmless if you rinse the sample with IPA.
Furthermore, if you anneal your samples take great care to ensure there is no oxygen present, as this will damage the graphene.
Kindly, don't repeat the existing question here.
I attached link to your another question, hopefully you can find out answer from that
https://www.researchgate.net/post/Annealing_of_Monolayer_Graphene?_tpcectx=home_feed#540e724ecf57d714188b45aa
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