When I used target of AgO2 to deposition thin film on glass substrate by pulsed laser deposition and When I check the thin films by XRD the peaks of Ag only appear and does not appear the peaks of AgO2.
you didn’t mention, what was the deposition atmosphere?
Some oxides, especially those of metals with a low oxidation state require partial oxygen pressure In the deposition chamber to avoid losses of stoichiometry.
depending on the laser pulse, the energy is strong enough to decompose the oxide, if no extra oxygen partial pressure is supplied, the tendency is to deposit the decomposition product, Ag.
Another try is to reduce the laser power. Nevertheless, there is a limit to reducing and keeping the deposition power.
I had several problems obtaining thin films from some metals using a vacuum.
In general, the vacuum generates losses in stoichiometry, even decompositions in hydrated targets. The limitation was corrected only by suppling some oxygen or humidity as a deposition atmosphere in the camber.
Unfortunately, I haven't deposited silver, which was not our main task.
Are you referring to AgO2 (an unusual compound with silver in the +4 oxidation state) or Ag2O with silver in the normal' +1 oxidation state)? In the presence of air or moisture Ag is always covered with a thin film of oxide (or sulfide if there's some sulfur in the environment).