We have recently replaced the tip seals on our scroll pump and since it came back our scroll pump has started acting oddly where the backing line settles at about 1E-1 mbar where previously it was at 3E-3 mbar. What is odd is as the main system pressure reaches the HV/UHV border the backing pressure increases. Furthermore, when the main system is flushed with a gas like Argon or nitrogen for 10-15mins. The main system returns to its previous pressure afterwards as expected but the forevacuum pressure drops into the low E-2's or high E-3's. Basically lower than it was before. This does not last though and after about 5 hours it has returned to about 1E-1 mbar where it settles.
Has anyone else encountered this before? I have spoken to the manufacturer but they are also a little confused.
If you spray alcohol on any of the flanges, do you see a pressure change? How many things did you disconnect and reconnect when removing and installing the pump? Are all those flanges clean and properly tightened? Don't trust anything. Check every flange, starting with the ones you just changed. Can you verify the pressure with another vacuum gauge? If you can't find a flange or gauge issue, it's probably a bad rebuild job on your pump.
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