If using EDX with TEM, as opposed to the SEM, provides higher spatial resolution, why is EDX typically used with SEM?
- SEM specimens are much easier to prepare and they are less artifact prone.
- For EDX quantification bulk specimens (SEM) are better suited than ultrathin ones (TEM).
- There are more SEMs around than TEMs.
- For proper EDX usage it should be not TEM, but STEM, and most TEMs are not equipped with scanning capabilities.
- If you use the same ultrathin specimen for both STEM and SEM, you'll have about the same spatial resolution (but of course imaging for STEM will be much better).
- SEM specimens are much easier to prepare and they are less artifact prone.
- For EDX quantification bulk specimens (SEM) are better suited than ultrathin ones (TEM).
- There are more SEMs around than TEMs.
- For proper EDX usage it should be not TEM, but STEM, and most TEMs are not equipped with scanning capabilities.
- If you use the same ultrathin specimen for both STEM and SEM, you'll have about the same spatial resolution (but of course imaging for STEM will be much better).
Dear Dr. Oksana Tovmachenko ,
an absorption correction of transmission EDX spectra obtained by TEM requires to know parameters such as specimen thickness, X-ray take-off angle, and specimen density. Spatial resolution of X-ray microanalysis in the (S)TEM is limited by the initial electron probe size and by subsequent beam broadening in the film.
For more details, please see the source: http://www.globalsino.com/micro/1/micro9999.html
Best regards, Pierluigi Traverso
Dear Oksana
The Energy Dispersive X-Ray Analysis (EDX) is basically inelastically scattered radiations from the bulk of solids, i.e.,> several monolayers in thickness, that can be detected by an EDX-detector in order to analyze the bulk compositions of the solids. So by default, EDX is more suitable for bulk-SEM samples rather than nearly transparent, i.e., ultra-thinned, TEM samples.
EDS depend on X-ray spectrum emitted by a solid sample bombarded with a
focused beam of electrons in order to gain localized chemical analysis
X-ray line, electron images generated by collected from the sample reveal surface topography or mean atomic number differences according to the mode selected. The scanning electron microscope (SEM), which is mostly related to the electron probe, is designed for producing electron images, but can also be used for element mapping, and even point analysis, if an X-ray spectrometer is added.
So there is an overlap in the functions of these instruments.
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