Why ellipsometer spectrum of silicon nitride (SixNx) shows the number of peaks at 530 nm excitation wavelength?

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Xuhua Wang

Multiple peaks are for sure from optical interference if your SixNx film thickness is much bigger than the wavelength. What is your film thickness then?

Saravanan Sigamani

Thank you for your response.

The film thickness calculated by 773.77 nm.

You should measure the film thickness using a surface profiler equipment such as Bruker-Deltaker or KLA-Tencor. The calculated film thickness is very often far from the real values.