Why did the Au film get creased after microwave plasma treatment?

18 July 2022 0 4K Report

The metal (Ti/Pt/Au on silcon) got creased when I wanted to strip PR. Curiously, the metal turns black in areas once covered by photoresist. the machine that I used is PVA-Tepla Microwave Stripper /Plasma processing system. I suspect that the temperature is unevenly distributed and the local temperature is too high during the treatment. but I can't explain the mechanism.

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