Dear 世文 Wu ,

I can try to make sense of those lines of code; in Silvaco TCAD, the error you’re seeing may be due to the use of the forward slash (/) in the file path or file name in the save command. In many systems, using a forward slash in a filename can lead to issues because it is often interpreted as a directory separator.

This is how to fix this:

(1) Avoid using the forward slash (/) in the name="A/B" argument. Instead, specify the directory path correctly or specify the full path with the correct format

(2) If you intended to save the file in a directory A, make sure that the directory exists in your current working directory or provide an absolute path.

(3) If your working directory or the specified directory (A in this case) does not have write permissions, it could lead to issues with saving. Ensure that you have the appropriate permissions.

(4) The error also mentions "Maximum heap size: 0 MB", which could suggest a memory limitation. If you’re running out of memory, try increasing the allocated memory for Silvaco TCAD if possible or close other programs to free up memory.

Hope this helps