Parameter: 0.3 sccm CH4 + 2 sccm H2 / 1000 C / 350 mTorr / 1-15 min
Pretreatment: Electropolishing + 30 min anneal with 10 sccm H2
Tried several times but get no carbon on copper, then tried to clean the quartz tube and the sample holder and check the impermeability. There is a small leakage but fixed now. Then tried three times with growth time 1, 3 and 15 min respectively but still cannot get any graphene. The Raman spectrum just shows the same signal as the bare copper but when the samples were heated at 160 C for several minutes, they didn’t get oxidized, which is different from the bare copper.
Has anyone met with such issue or know the reason?