1 Questions 2 Answers 0 Followers
Questions related from Pengcheng Luan
Parameter: 0.3 sccm CH4 + 2 sccm H2 / 1000 C / 350 mTorr / 1-15 min Pretreatment: Electropolishing + 30 min anneal with 10 sccm H2 Tried several times but get no carbon on copper, then tried to...
02 January 2021 9,934 3 View