Crystallization and phase transformation of amorphous Co0:33Si0:67

thin films prepared by radio frequency magnetron sputtering usingCoSi2

alloy target were researched by X-ray diffraction in situ. The results showed that CoSi formed firstly at 250C and some of the films werestill amorphous. The residual amorphous films transformed to CoSi2at 300C, CoSi and CoSi2remained stable at 350–500C and CoSitransformed to CoSi2

when the temperature was elevated further. The first phase that precipitated from the amorphous Co-Si films was decidedby the effective heat of formation of phases and the short-range structure of amorphous films.

But sir I want to know the thickness.

that you have to measure using any instrument of it. but you can control it by its deposition time. Deposition rate can determined from the film thickness measured from step profiles, using a stylus profilometer.and deposition rate

changes with Ar pressure

increases with sputter yield

usually increases with high voltage

but  i am depositing over glass 1*1 cm^2 , and whole surface is covered by film, where i will get the step to measure.?

any method or mathematical formula do you know sir?

There is no useful mathematical formulation to calculate the deposition rate of a co-sputter deposition experiment! The deposition rate of a single metal material depends on the cathode power, pressure of the sputtering (inert) gas during deposition, distance cathode-susbtrate, size and shape of the cathode, bias substrate, substrate temperature, and magnetic strength of the magnet inside the cathode. When you have two cathodes, if the materials react, then the volume of the resulting alloy can be bigger or smaller than the volume resulting of an simple addition of the single volumes of each metal. If you have Si, then it is more complicated, as the previous answer of Thomas Scheller ·tried to explain.

The only possibility for you is to mask a part of the glass, and make depositions at 3-4 different deposition times, trying to keep all the parameters constant. Then you measure the thickness by a step profilometer, or make a cross section and use a SEM microscope.