I am investigating some off-stoichiometric delafossite structure by TEM. I am observing some missing atomic lines (10- 20 atoms missing). This happens for many grains (hence not an isolated case) but not for all samples. Therefore I would like to know if this defect is characteristic for the sample or is possible to appears during sample preparation. During this preparation process I am using a FIB based on Galium. My question is then: does somebody already observed this kind of defect appearing during an ion bombarding?