Dear all,
I am interested to know the methods and detailed analysis of X-ray fluorescence spectroscopy. In general, from the XRF spectra, one can evaluate the elemental and chemical analysis of metals, glass, chemical composition, etc.
I am eager to understand that from the XRF spectra do we can do any other analysis like thickness, refractive index, etc.
Thanking you
From XRF data, you may extract the composition of the material and thickness of the multi-layer structure. Micro-XRF usually is a bridge between EDS with a sub-microns spatial resolution to micron-scale spatial resolution. A commercial micro-XRF instrument may be equipped from 10 microns spot size and up to 1 mm. Large spot size considers as Macro instruments. Depending on the type of detector, micro-XRF instruments may detect elements starting from C (Carbon) up to Am (Americium). If you have any questions, let me know.
XRF can give you qualitative data, i.e. identifying which elements are present in a sample by looking at their X-ray lines in the spectrum, and quantitative data (either coating thickness or elemental composition).
Quantitative data is obtained through measuring samples against a calibration. Calibrations can be empirical (known reference materials are measured and their elements' x-ray line intensities are plotted against their known concentration/thickness, establishing a relationship between both)), or they can be based on x-ray physics (fundamental parameters method). Depending on the analyzer and the type of sample, you can determine low ppm levels from very high %s, and measure the thickness of multi-layers from nm to several um.
Do not hesitate to contact me if you want more information.
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